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Tubular Sputtering Targets (C-Mags)

Rotatable C-Mag technology has been used in large area coating for manufacturing architectural glass and thin films since the early 1990’s.The original (McKelvey) patent for a rotatable magnetron sputtering cathode in 1982 used Tico Titanium sputtering tubes.

Coating Materials makes all forms of cylindrical magnetron sputtering targets, including those with ends that have been developed over the last few years and has a license to manufacture the QCT (VDS) type end.

Coating Material’s sputtering tubes are extruded from large input billets then straightened and finished on the OD and ID. After this process the ends are finish machined per customer request.

Coating Materials has entered into stocking agreements with several companies worldwide to better control the cost of ownership and availability of materials for fast shipments of product. Coating Materials can provide quotations for your sputtering needs via any of the contact information provided.

Backing tubes are also available. Co-extruded tubes are available due to new co-extrusion technology, which allows the tube to have an inner material that is less expensive than the outer material that is to be sputtered. For instance, Niobium over Titanium or Zirconium over Titanium. Copper over Titanium co-extrusions are also made to better control the straightness of the copper tube.

Extrusions are offered in sizes of from 2” Diameter up to 8.625” Diameter. in lengths from fractions of an inch up to 160 inches, wall thicknesses from 1/8 inch up to (and plus) 1 inch. Also available in metric sizes.

Target Tube (TU) Standard Type
Part No. Length (mm) Length (inches)
TU6534 863.6 34.0
TU6540 1021.1 40.2
TU6554 1198.9 54.2
TU6571 1800.5 71.2
TU6584 2138.7 84.2
TU6596 2443.5 96.2
TU65114 2900.7 114.2
TU65136 3454.4 136.0

Target Tube (TU) QCT Type
Part Number Length (mm) Length (inches)
TU6533 849 33.43
TU6539 1007 39.65
TU6546 1185 46.65
TU6553 1357 53.43
TU6570 1794 70.63
TU6583 2124 83.62
TU6595 2429 95.63
TU65104 2651 104.38
TU65113 2886 113.62
TU65125 3194 125.63
TU65135 3440 135.43
TU65140 3559 140.13
TU65151 3852 151.65
Sputtering Targets and Materials
Material Tube Form Clamp Down Bolt Down Bonded Stock Material
Aluminum X X X X X
Bronze - X X X X
Chromium - X - X -
Copper X X X X X
Hafnium - X X X -
Molybdenum - X X X -
Nickel Alloy - X X X -
Niobium X X X X X
Silver - X - X -
Stainless X X X X X
Tantalum - X X X -
Tin - X X X -
Titanium X X X X X
Tungsten - X - X -
Zinc - X - X X
Zirconium X X X X X
X Indicates Availability

Coating Materials,
Div of Tico Titanium
30150 South Wixom Road • Wixom, MI 48393
Ph: 888-267-1883 • Fax: 248-313-2501

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